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One Domain, Four Schemas

TL;DR for operators Scientific-literature extraction is not only a question of whether an AI system can find the right facts. It also needs a representation capable of preserving the distinctions engineers will later use. Sadruddin et al. build four separate machine-validatable process schemas for atomic layer deposition (ALD) and atomic layer etching (ALE), divided again between experiments and simulations.1 The split is consequential: the schemas contain between 167 and 275 properties, while required-property counts range from just 3 in ALD simulation to 56 in ALE simulation. ...

October 15, 2026 · 7 min · Zelina